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Technical Paper
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723-729
Technical paper
The design and simulation of a novel out-of-plane micro electrostatic actuator
Chingfu Tsou
730-735
Technical paper
Rapid hot embossing of polymer microfeatures
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Technical paper
Identification of material and geometrical parameters for microstructures by dynamic finite element model updating
Kun-Nan Chen, Wei-Hsin Gau and Yuh-Chung Hu
746-753
Technical paper
Microfabricated fluorescence-activated cell sorter through hydrodynamic flow manipulation
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Technical Paper
A roller embossing process for rapid fabrication of microlens arrays on glass substrates
C. Y. Chang, S. Y. Yang and J. L. Sheh
760-765
Technical Paper
Microchannel heat sink fabrication with roughened bottom walls
H. Yang, F. Lee and R. Chein
766-772
Technical paper
A micromachined tunable resonator fabricated by the CMOS post-process of etching silicon dioxide
Ching-Liang Dai and Wei-Chiang Yu
773-777
Technical paper
Microcasting of Al bronze and a gold base alloy improved by plaster-bonded investment
G. Baumeister, S. Rath and J. Hausselt
778-785
Technical Paper
Metallic micro displacement capacitive sensor fabricated by laser micromachining technology
Yongjun Lai, Evgueni V. Bordatchev and Suwas K. Nikumb
786-789
Technical paper
A novel method to fabricate complex three-dimensional microstructures
Jing-Quan Liu, Hong-Wen Sun, Ling-Han Li and Di Chen
790-795
Technical paper
Micro structuring of borosilicate glass by high-temperature micro-forming
Andreas Schubert, Jan Edelmann and Thomas Burkhardt
796-802
Technical Paper
Modeling and verification of the double frequency effect using a MEMS device
J. C. Chiou and Y. J. Lin