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Volume 1 / 1994 - Volume 18 / 2012
803-813
Technical Paper
Modeling product variations in hard disk drive micro-actuator suspensions
M. Rotunno, R. Oboe and R. A. de Callafon
814-821
Non-contact tape tension measurement and correlation of lateral tape motion and tape tension transients
Bart Raeymaekers, Ryan J. Taylor and Frank E. Talke
822-838
Modeling, analysis and design of centrifugal force driven transient filling flow into rectangular microchannel
Dong Sung Kim and Tai Hun Kwon
839-845
Technical paper
Fabrication of high-aspect-ratio microscale mold inserts by parallel μEDM
D. M. Cao, J. Jiang, R. Yang and W. J. Meng
846-853
Surface topography of planar PMMA grating structures produced by the UV-laser based phase mask method
C. Wochnowski, S. Metev and F. Vollertsen
854-869
Adhesion and contact modeling and experiments in microelectromechanical systems including roughness effects
N. Tayebi and A. A. Polycarpou
870-876
Electroplating of micro-patterned tools via replication of silicone rubber forms
J. Lorenz, G. Schanz, N. Holstein and J. Konys
877-882
Mechanical punching of 15 μm size hole
Sang Min Yi, Byung Yun Joo, Min Soo Park, Chong Nam Chu and Soo-Ik Oh
883-890
Fabrication and characterizations of a monolithic PZT microstage
Hegen Xu, Takahito Ono, De-Yuan Zhang and Masayoshi Esashi
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