HARMST, High Aspect Ratio Micro Structure Technology Workshop, Gyenogju, Korea, 10-13 Jnue 2005 (This is the first of two issues)
207
Editorial
HARMST, High Aspect Ratio Micro Structure Technology Workshop, Gyenogju, Korea, 10–13 June 2005
Tai Hun Kwon and Bernd Michel
209-214
Technical paper
Geometrical strengthening and tip-sharpening of a microneedle array fabricated by X-ray lithography
Sommawan Khumpuang, Mitsuhiro Horade, Kazuya Fujioka and Susumu Sugiyama
215-219
Technical paper
Mask design compensation for sloped sidewall structures fabricated by X-ray lithography
Mitsuhiro Horade, Sommawan Khumpuang, Kazuya Fujioka and Susumu Sugiyama
221-225
Technical Paper
Fabrication of high aspect ratio nano gratings using SR lithography
Fumiki Kato, Shinya Fujinawa, Yigui Li and Susumu Sugiyama
227-230
Technical paper
Fabrication of microgratings on PMMA plate and curved surface by using copper mesh as X-ray lithography mask
Yigui Li and Susumu Sugiyama
231-235
Technical Paper
High aspect ratio tapered hollow metallic microneedle arrays with microfluidic interconnector
Kabseog Kim and Jeong-Bong Lee
237-243
Technical paper
High aspect ratio air core solenoid inductors using an improved UV-LIGA process with contrast enhancement material
Hong Lu, Brandon Pillans, Jong-Chang Lee and Jeong-Bong Lee
245-251
Technical paper
SU-8 3D microoptic components fabricated by inclined UV lithography in water
Z. Ling and K. Lian
253-257
Technical paper
In situ fabrication of SU-8 movable parts by using PAG-diluted SU-8 as the sacrificial layer
Z. Ling and K. Lian
259-264
Technical paper
Processing-microstructure-resulting materials properties of LIGA Ni
K. Lian, J. C. Jiang and Z. G. Ling
265-270
Technical Paper
Method for polymer hot embossing process development
Proyag Datta and Jost Goettert
271-277
Technical Paper
Design and fabrication of a SU-8 based electrostatic microactuator
Wen Dai, Kun Lian and Wanjun Wang
279-286
Technical paper
Design and UV-LIGA microfabrication of an electro-statically actuated power relay
S. J. Jeong and W. Wang
287-291
Technical Paper
Fabrication of a polymeric tapered HARMs array utilizing a low-cost nickel electroplated mold insert
In-Hyouk Song, Yoonyoung Jin and Pratul K. Ajmera
293-298
Technical paper
Different methods for the fabrication of UV-LIGA molds using SU-8 with tapered de-molding angles
C. Fu and H. Huang
299-304
Technical paper
Effect of seed layer stress on the fabrication of monolithic MEMS microstructure
C. K. Chung, Y. J. Fang, C. M. Cheng, Y. Z. Hong and C. H. Wang
305-310
Technical Paper
Micro-specific design flow for tool-based microtechnologies
Albert Albers, Norbert Burkardt, Tobias Deigendesch and Jochen Marz
311-317
Technical paper
SU-8: promising resist for advanced direct LIGA applications for high aspect ratio mechanical microparts
J. Kouba, R. Engelke, M. Bednarzik, G. Ahrens and Heinz-Ulrich Scheunemann, et al.
319-325
Technical Paper
Investigations on possibilities of inline inspection of high aspect ratio microstructures
Rainer Engelke, Gisela Ahrens, Norbert Arndt-Staufenbiehl, Stefan Kopetz and Karin Wiesauer, et al.
327-334
Technical Paper
Direct LIGA service for prototyping: status report
B. Loechel, J. Goettert and Y. M. Desta
335-338
Technical paper
A new removable resist for high aspect ratio applications
Matthias Schirmer, Doris Perseke, Eva Zena, Daniel Schondelmaier and Ivo Rudolph, et al.
339-342
Technical Paper
Microlens fabrication using an etched glass master
P. Zhang, G. Londe, J. Sung, E. Johnson and M. Lee, et al.
343-347
Technical Paper
Fabrication of RF MEMS variable capacitors by deep X-ray lithography and electroplating
Sven Achenbach, David Klymyshyn, Darcy Haluzan, Timo Mappes and Garth Wells, et al.
349-353
Technical Paper
Structure quality in deep X-ray lithography applying commercial polyimide-based masks
Sven Achenbach, Martin Boerner, Seichin Kinuta, Walter Bacher and Juergen Mohr, et al.
355-360
Technical Paper
Process conditions in X-ray lithography for the fabrication of devices with sub-micron feature sizes
Timo Mappes, Sven Achenbach and Juergen Mohr
361-368
Technical Paper
Fabrication of micro-gas chromatograph columns for fast chromatography
Abhinav Bhushan, Dawit Yemane, Dan Trudell, Edward B. Overton and Jost Goettert
369-377
Technical Paper
A hybrid approach for fabrication of polymeric BIOMEMS devices
Varshni Singh, Yohannes Desta, Proyag Datta, Jason Guy and Mark Clarke, et al.
379-384
Technical Paper
Large area micro hot embossing of Pyrex glass with GC mold machined by dicing
Masaharu Takahashi, Yoichi Murakoshi, Ryutaro Maeda and Kohei Hasegawa
385-391
Technical paper
Development of precision transfer technology of atmospheric hot embossing by ultrasonic vibration
Harutaka Mekaru, Osamu Nakamura, Osamu Maruyama, Ryutaro Maeda and Tadashi Hattori
393-402
Technical paper
Fabrication of a spiral microcoil using a 3D-LIGA process
Harutaka Mekaru, Shinji Kusumi, Noriaki Sato, Masami Shimizu and Michiru Yamashita, et al.
403-407
Technical Paper
Study of PMMA thermal bonding
Xuelin Zhu, Gang Liu, Yuhua Guo and Yangchao Tian
409
Erratum
High aspect ratio air core solenoid inductors using an improved UV-LIGA process with contrast enhancement material
Hong Lu, Brandon Pillans, Jong-Chan Lee, Kyunghwan Kim and Jeong-Bong Lee