HARMST, High Aspect Ratio Micro Structure Technology Workshop, Gyenogju, Korea, 10-13 Jnue 2005 (This is the second of two issues)
411-415
Technical Paper
Analysis of the demolding forces during hot embossing
Yuhua Guo, Gang Liu, Xuelin Zhu and Yangchao Tian
417-423
Technical Paper
Large area and wide dimensions X-ray lithography using energy variable synchrotron radiation
Yuichi Utsumi, Takefumi Kishimoto, Tadashi Hattori and Hirotsugu Hara
425-429
Technical Paper
Planar microreactor for biochemical application made from silicon and polymer films
Yuichi Utsumi, Yusuke Hitaka, Katsuhiro Matsui, Masahiro Takeo and Seiji Negoro, et al.
431-434
Technical paper
Proton beam writing: a tool for high-aspect ratio mask production
J. A. van Kan, P. G. Shao, K. Ansari, A. A. Bettiol and T. Osipowicz, et al.
435-439
Technical paper
Fluid filter fabricated by deep X-ray lithography for micro fluidics
Yoshiaki Ukita, Toshifumi Asano and Yuichi Utsumi
441-446
Technical Paper
Fabrication of a micro reactor for vertical unit operation using multifunctional fluid filter and its application to biochemical reaction
Toshifumi Asano, Yoshiaki Ukita, Katsuhiro Matsui, Masahiro Takeo and Seiji Negoro, et al.
447-453
Technical Paper
Deep microstructuring in glass for microfluidic applications
Chantal Khan Malek, Laurent Robert, Jean-Jacques Boy and Pascal Blind
455-463
Technical Paper
Fabrication of components for a valve-less micropump or microejector by multilevel electroforming technology
S. C. Chen, C. H. Cheng and Y. C. Lin
465-474
Technical Paper
Parameter optimization for an ICP deep silicon etching system
S. C. Chen, Y. C. Lin, J. C. Wu, L. Horng and C. H. Cheng
475-481
Technical Paper
Revisiting micro hot-embossing with moulds in non-conventional materials
Chantal Khan Malek, Jean-René Coudevylle, Jean-Claude Jeannot and Roland Duffait
483-486
Technical paper
Nanostructures on microstructured surfaces
Alexander Disch, Jörg Mick, Benedikt Bläsi and Claas Müller
487-493
Technical paper
Fabrication of support structures to prevent SU-8 stiction in high aspect ratio structures
K. D. Vora, A. G. Peele, B.-Y. Shew, E. C. Harvey and J. P. Hayes
495-501
Technical paper
Metal micromolding: further experiments and preliminary finite element analysis
D. M. Cao, J. Jiang, W. J. Meng and G. B. Sinclair
503-510
Technical paper
Fabrication of high-aspect-ratio microscale Ta mold inserts with micro electrical discharge machining
D. M. Cao, J. Jiang, W. J. Meng, J. C. Jiang and W. Wang
511-515
Technical paper
Production issues for high aspect ratio Lobster-eye optics using LIGA
A. G. Peele, K. D. Vora, B.-Y. Shew, B. Loechl and E. C. Harvey, et al.
517-522
Technical paper
Polymeric microneedle fabrication using a microinjection molding technique
Firas Sammoura, JeongJin Kang, Young-Moo Heo, TaeSung Jung and Liwei Lin
523-530
Technical paper
Fabrication and analysis of the reflowed microlens arrays using JSR THB-130 N photoresist with different heat treatments
C. K. Chung and Y. Z. Hong
531-536
Technical paper
Fabrication of the monolithic polymer–metal microstructure by the backside exposure and electroforming technology
C. K. Chung, Y. Z. Hong and W. T. Chang
537-541
Technical paper
Effect of pulse frequency on the morphology and nanoindentation property of electroplated nickel films
C. K. Chung and W. T. Chang
543-546
Technical Paper
Fabrication of diffraction grating for X-ray Talbot interferometer
Masatake Matsumoto, Kinji Takiguchi, Makoto Tanaka, Yoichi Hunabiki and Hiroaki Takeda, et al.
547-550
Technical paper
Design of solenoidal electromagnetic microactuator utilizing 3D X-ray lithography and metalization
Hiroaki Mochizuki, Harutaka Mekaru, Shinji Kusumi, Noriaki Sato and Masami Shimizu, et al.
551-555
Technical Paper
A novel reluctance actuator employing an embedded ferromagnetic foil
A. Waldschik, M. Feldmann and S. Büttgenbach
557-562
Technical paper
Technology and application of electro-depositable photo resists to create uniform coatings needed for complex 3D micro actuators and sensors
M. Feldmann, A. Waldschik and S. Büttgenbach
563-567
Technical Paper
A piezoelectric micro-cantilever bio-sensor using the mass-micro-balancing technique with self-excitation
Yeolho Lee, Geunbae Lim and Wonkyu Moon
569-577
Technical paper
Study on the method for the reliability test of focused ion beam
Sang H. Lee, Hyun-Wook Kang, Dong-Woo Cho and Wonkyu Moon
579-587
Technical Paper
Fabrication and characterization of 3-Dimensional MOS transistor tip integrated micro cantilever
Sang H. Lee, Pan K. Kim, Wonkyu Moon and Geunbae Lim
589-592
Technical paper
Effect of irradiation on the surface microhardness of pure poly(vinyl fluoride), poly(vinylidene fluoride) and their isomorphic blends
A. K. Gupta, R. Bajpai and J. M. Keller
593-599
Technical paper
UV nano embossing for polymer nano structures with non-transparent mold insert
Hyun Sup Lee, Dong Sung Kim and Tai Hun Kwon
601-606
Technical paper
Replication of high-aspect-ratio nanopillar array for biomimetic gecko foot-hair prototype by UV nano embossing with anodic aluminum oxide mold
Dong Sung Kim, Hyun Sup Lee, Junghyun Lee, Sungjoo Kim and Kun-Hong Lee, et al.