Special issue: Conference Smart Sensors, Actuators and MEMS, Maspalomas, Gran Canaria, Spain, 2-4 May 2007

• 439

  Editorial

  Special Issue of the Conference Smart Sensors, Actuators and MEMS, Maspalomas, Gran Canaria, Spain, 2–4 May 2007

  B. Michel, T. Becker and U. Schmid

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• 441-451

  Technical Paper

  Silicon cantilever sensor for micro-/nanoscale dimension and force metrology

  Erwin Peiner, Lutz Doering, Michael Balke and Andreas Christ

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• 453-462

  Technical Paper

  VHDL Implementation of a communication interface for integrated MEMS

  E. Magdaleno Castelló, M. Rodríguez Valido and A. J. Ayala Alfonso

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• 463-474

  Technical Paper

  Development of automated microrobot-based nanohandling stations for nanocharacterization

  Sergej Fatikow, Volkmar Eichhorn, Florian Krohs, Iulian Mircea and Christian Stolle, et al.

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• 475-482

  Technical Paper

  Novel sensor design methodology for measurements of the complex solar wind–magnetospheric–ionospheric system

  G. Dekoulis and F. Honary

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• 483-490

  Technical Paper

  Characterization of aluminium nitride and aluminium oxide thin films sputter-deposited on organic substrates

  U. Schmid, A. Ababneh, H. Seidel, R. Wagner and K. Bauer

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• 491-498

  Technical Paper

  Bismuth film electrodes for heavy metals determination

  Vlastimil Rehacek, Ivan Hotovy, Marian Vojs and Fedor Mika

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• 499-507

  Technical Paper

  Mixed metal oxide films as pH sensing materials

  Edric Gill, Khalil Arshak, Arousian Arshak and Olga Korostynska

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• 509-515

  Technical Paper

  Wafer-level plasma activated bonding: new technology for MEMS fabrication

  Viorel Dragoi, Gerald Mittendorfer, Christine Thanner and Paul Lindner

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• 517-525

  Technical Paper

  Optimizing the performance of a Coriolis-based angular rate sensor applying an analytical approach

  A. Kulygin, M. Gergen, U. Schmid and H. Seidel

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• 527-534

  Technical Paper

  Investigation of fabrication and encapsulation processes for a flexible tag microlab

  E. Abad, B. Mazzolai, A. Juarros, D. Gómez and A. Mondini, et al.

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• 535-541

  Technical Paper

  Fabrication and characterization of a passive silicon-based direct methanol fuel cell

  J. P. Esquivel, N. Sabaté, J. Santander, N. Torres and C. Cané

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• 543-549

  Technical Paper

  A new micromachined sensor system for tactile measurements of high aspect ratio microstructures

  M. Balke, E. Peiner and L. Doering

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• 551-556

  Technical Paper

  A liquid chromatography miniaturised system for agrofood applications

  Antonella Benvenuto, Leandro Lorenzelli, Cristian Collini, Vittorio Guarnieri and Andrea Adami, et al.

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• 557-566

  Technical Paper

  Ozone and gamma radiation sensing properties of In₂O₃:ZnO:SnO₂ thin films

  O. Korostynska, K. Arshak, G. Hickey and E. Forde

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• 567-573

  Technical Paper

  Etching behaviour of sputter-deposited aluminium nitride thin films in H₃PO₄ and KOH solutions

  A. Ababneh, H. Kreher and U. Schmid

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• 575-579

  Technical Paper

  Design and consideration of wafer level micropackaging for distributed RF MEMS phase shifters

  Xun-jun He, Qun Wu, Bo-shi Jin, Kai Tang and Ming-xin Song, et al.

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• 581-588

  Technical Paper

  Ultra-low-power components for an RFID Tag with physical and chemical sensors

  Stefano Zampolli, Ivan Elmi, Enrico Cozzani, Gian Carlo Cardinali and Andrea Scorzoni, et al.

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• 589-599

  Technical Paper

  A labchip for highly selective and sensitive electrochemiluminescence detection of Hg²⁺ ions in aqueous solution employing integrated amorphous thin film diodes

  Heiko Schäfer, Hengwei Lin, Michael Schmittel and Markus Böhm

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• 601-606

  Technical Paper

  Germanium resistors for RF MEMS based microsystems

  K. Grenier, C. Bordas, S. Pinaud, L. Salvagnac and D. Dubuc

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• 607-614

  Technical Paper

  Measurement of the pressure broadening coefficients of the oxygen A-band using a low cost, polarization stabilized, widely tunable vertical-cavity surface-emitting laser

  Benjamin Scherer, Jürgen Wöllenstein, Matthias Weidemüller, Wenzel Salzmann and Johannes Michael Ostermann, et al.

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• 615-622

  Technical Paper

  Coupling coefficient determination based on simulation and experiment for ST-Cut quartz saw delay-line response

  Yi-Chu Hsu and Ngoc-Bich Le

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• 623-628

  Technical Paper

  Compensation methods for a silicon tuning fork gyroscope

  Eik Arnold and Franz Nuscheler

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• 629-635

  Technical Paper

  Gallium arsenide suspended microheater for MEMS sensor arrays

  I. Hotovy, V. Rehacek, F. Mika, T. Lalinsky and S. Hascik, et al.

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• 637-644

  Technical Paper

  A compact optical multichannel system for ethylene monitoring

  J. Hildenbrand, J. Wöllenstein, S. Hartwig, A. Eberhardt and B. Halford, et al.

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• 645-651

  Technical Paper

  Nano- and microsized metal oxide thin film gas sensors

  Stefan Palzer, Emmanuel Moretton, Francisco Hernandez Ramirez, Albert Romano-Rodriguez and Jürgen Wöllenstein

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• 653-658

  Technical Paper

  Design and implementation of mechanical resonators for optimized inertial electromagnetic microgenerators

  Christophe Serre, Alejandro Pérez-Rodríguez, Nuria Fondevilla, Emile Martincic and Susanna Martínez, et al.

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• 659-664

  Technical Paper

  Dye and polymer based light sensor for tag integration

  Ilker Sayhan, Marie-Luise Bauersfeld, Juergen Woellenstein and Thomas Becker

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• 665-671

  Technical Paper

  Three-dimensional simulation of sacrificial etching

  Johann Cervenka, Hajdin Ceric and Siegfried Selberherr

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• 673-681

  Technical Paper

  RNA amplification chip with parallel microchannels and droplet positioning using capillary valves

  Liv Furuberg, Michal Mielnik, Anja Gulliksen, Lars Solli and Ib-Rune Johansen, et al.

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• 683-690

  Technical Paper

  Fabrication and characterization of a monolithic piezoelectric actuator for fiber coupling

  C. Bruchmann, B. Höfer, P. Schreiber, R. Eberhardt and W. Buss, et al.

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• 691-695

  Technical Paper

  PNIPAM: a thermo-activated nano-material for use in optical devices

  Solon Mias, Jan Sudor and Henri Camon

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• 697-704

  Technical Paper

  Micro actuators on the basis of thin SMA foils

  M. Leester-Schädel, B. Hoxhold, C. Lesche, S. Demming and S. Büttgenbach

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