Special issue on High Aspect Ratio Micro Structure Technology Workshop, Besançon, France, 7-9 June 2007
1215-1216
Editorial
Special issue of the high-aspect-ratio micro-structure technology workshop, HARMST’07, Besançon, France, 7–9 June 2007
Chantal Khan Malek, Volker Saile and Bernd Michel
1217-1222
Technical Paper
Application of inclined-exposure and thick film process for high aspect-ratio micro-structures on polymer optic devices
Kuo-Yung Hung and Te-Hsien Liang
1223-1226
Technical Paper
Fabricating HARMS by using megasonic assisted electroforming
Gang Liu, Xinlong Huang, Ying Xiong and Yangchao Tian
1227-1232
Technical Paper
Statistical process and measurement control for micro production
G. Lanza, J. Fleischer and M. Schlipf
1233-1243
Technical Paper
High throughput projection UV lithography of high-aspect-ratio thick SU-8 microstructures
Ren Yang, Chuck Mullen, Mark Schaline, Karl Reithmaier and Ron Sheets
1245-1249
Technical Paper
Fabrication of ceramic microcomponents and microreactor for the steam reforming of ethanol
Jun Wang, Gang Liu, Ying Xiong, Xinlong Huang and Yuhua Guo, et al.
1251-1255
Technical Paper
Fabrication of Fresnel zone plates with high aspect ratio by soft X-ray lithography
Longhua Liu, Gang Liu, Ying Xiong, Jie Chen and Chunlei Kang, et al.
1257-1261
Technical Paper
Applications of thick Sacrificial-Layer of zinc in LIGA process
XinLong Huang, Gang Liu, Xiong Ying, Jun Wang and Yuhua Guo, et al.
1263-1267
Technical Paper
Fast patterning microstructures using inkjet printing conformal masks
C.-H. Lin, H. Yang, F.-Y. Chang, S.-H. Chang and M.-T. Yen
1269-1277
Technical Paper
On the simulation of molded micro components and systems
Albert Albers, Hans-Georg Enkler and Pablo Leslabay
1279-1284
Technical Paper
The anomalous behavior and properties of Ni–Co films codeposited in the sulfamate-chloride electrolyte
C. K. Chung, R. X. Zhou and W. T. Chang
1285-1290
Technical Paper
Microlens array fabrication by backside exposure using Fraunhofer diffraction
In-Hyouk Song, Kyung-Nam Kang, Yoonyoung Jin, Daniel S.-W. Park and Pratul K. Ajmera
1291-1297
Technical Paper
Lithography with UV-LED array for curved surface structure
S. Suzuki and Y. Matsumoto
1299-1303
Technical Paper
Reflectivity test of X-ray mirrors for deep X-ray lithography
V. Nazmov, E. Reznikova, A. Last, M. Boerner and J. Mohr
1305-1310
Technical Paper
Fabrication of micro sloping structures of SU-8 by substrate penetration lithography
J. Onishi, K. Makabe and Y. Matsumoto
1311-1315
Technical Paper
Fabrication of large area diffraction grating using LIGA process
Daiji Noda, Makoto Tanaka, Kazuma Shimada, Wataru Yashiro and Atsushi Momose, et al.
1317-1323
Technical Paper
Effect of baffle height and Reynolds number on fluid mixing
C. K. Chung, C.-Y. Wu and T. R. Shih
1325-1333
Technical Paper
Effect of applying ultrasonic vibration in thermal nanoimprint lithography
Harutaka Mekaru, Toshihiko Noguchi, Hiroshi Goto and Masaharu Takahashi
1335-1342
Technical Paper
A Si stencil mask for deep X-ray lithography fabricated by MEMS technology
Harutaka Mekaru, Takayuki Takano, Yoshiaki Ukita, Yuichi Utsumi and Masaharu Takahashi
1343-1348
Technical Paper
Proton beam writing: a platform technology for nanowire production
J. A. van Kan, F. Zhang, S. Y. Chiam, T. Osipowicz and A. A. Bettiol, et al.
1349-1357
Technical Paper
High-aspect-ratio through-hole array microfabricated in a PMMA plate for monodisperse emulsion production
Isao Kobayashi, Sayumi Hirose, Takanori Katoh, Yanping Zhang and Kunihiko Uemura, et al.
1359-1365
Technical Paper
Micromachining of electroformed nickel mold using thick photoresist microstructure for imprint technology
Takayuki Shibata, Yoichi Takahashi, Takahiro Kawashima, Toshio Kubota and Mamoru Mita, et al.
1367-1372
Technical Paper
Process parameter analysis in ablating micro-mold manufacturing
J. Fleischer, G. Halvadjiysky and S. Haupt
1373-1379
Technical Paper
Cylindrical coils created with 3D X-ray lithography and metallization
Yoshifumi Matsumoto, Masaru Setomoto, Daiji Noda and Tadashi Hattori
1381-1388
Technical Paper
Resin micromachining by roller hot embossing
Naoya Ishizawa, Kazuyoshi Idei, Taro Kimura, Daiji Noda and Tadashi Hattori
1389-1394
Technical Paper
Effect of cobalt content on the work function of the electrodeposited nickel–cobalt films
C. K. Chung, W. T. Chang and R. X. Zhou
1395-1398
Technical Paper
Fabrication of the cyclical fluid channel using the surface acoustic wave actuator and continuous fluid pumping in the cyclical fluid channel
Daisuke Fukuoka and Y. Utsumi
1399-1403
Technical Paper
High sensitive immunoassay for endocrine disrupting chemicals using antibody immobilized microcapillary bundle structure
Yuichi Utsumi, Toshifumi Asano, Yoshiaki Ukita, Katsuhiro Matsui and Masahiro Takeo, et al.
1405-1409
Technical Paper
Microstructure formation on low temperature co-fired ceramic green substrates using micro embossing
Xuechuan Shan, H. P. Maw, R. T. Tjeung, S. H. Ling and C. W. Lu, et al.
1411-1416
Technical Paper
High efficiency mixing by the use of cross-linked micro capillary fluid filter
K. Fujiwara, Y. Ukita, M. Takeo, S. Negoro and T. Kanie, et al.
1417-1422
Technical Paper
Fabrication of a PTFE-filled waveguide for millimeter-wave components using SR direct etching
Mitsuyoshi Kishihara, Yoshiaki Ukita, Yuichi Utsumi and Isao Ohta
1423-1428
Technical Paper
Aqueous base developable: easy stripping, high aspect ratio negative photoresist for optical and proton beam lithography
M. Chatzichristidi, I. Rajta, Th. Speliotis, E. Valamontes and D. Goustouridis, et al.
1429-1438
Technical Paper
Chip-level integration of RF MEMS on-chip inductors using UV-LIGA technique
Daniel Sang-Won Park, Youngkyun Jeong, Jeong-Bong Lee and Sungyong Jung
1439-1446
Technical Paper
Femtosecond pulse laser interactions with thin silicon films and crater formation considering optical phonons and wave interference
Hyung Sub Sim, Seong Hyuk Lee and Kwan Gu Kang
1447-1450
Technical Paper
A new UV sensitive positive resist for X-ray masks manufacture
Anja Voigt, Marina Heinrich, Gabi Gruetzner, Josef Kouba and H.-U. Scheunemann, et al.
1451-1459
Technical Paper
High functionality of a polymer nanocomposite material for MEMS applications
Fareed Dawan, Yoonyoung Jin, Jost Goettert and Samuel Ibekwe
1461-1466
Technical Paper
Integrated structure of PMMA microchannels for DNA separation by microchip capillary electrophoresis
Yuichi Utsumi, Tomohiro Ikeda, Megumi Minamitani and Kazuo Suwa
1467-1473
Technical Paper
Enhancement of the adhesive force of metal films on PTFE surface achieved by fast-atom-beam surface modification
Yuichi Utsumi and Takefumi Kishimoto
1475-1480
Technical Paper
Investigations of development process of high hollow beveled microneedles using a combination of ICP RIE and dicing saw
N. Baron, J. Passave, B. Guichardaz and G. Cabodevila
1481-1485
Technical Paper
Validation of micromechanical systems
Albert Albers, Norbert Burkardt, Tobias Deigendesch, Claudia Ellmer and Stefan Hauser
1487-1489
Technical Paper
Commercialising HARMST-LIGA technologies
David Tolfree
1491-1497
Technical Paper
Why you will use the deep X-ray LIG(A) technology to produce MEMS?
Pascal Meyer, Joachim Schulz, Lothar Hahn and Volker Saile
1499-1505
Technical Paper
Using bulk micromachined structures to enhance pool boiling heat transfer
Min Zhang and Kun Lian
1507-1514
Technical Paper
Micro injection molding for mass production using LIGA mold inserts
Takanori Katoh, Ryuichi Tokuno, Yanping Zhang, Masahiro Abe and Katsumi Akita, et al.
1515-1523
Technical Paper
Stress engineering and mechanical properties of SU-8-layers for mechanical applications
J. Hammacher, A. Fuelle, J. Flaemig, J. Saupe and B. Loechel, et al.
1525-1529
Technical Paper
Manufacturing of microstructures with high aspect ratio by micromachining
T. Gietzelt, L. Eichhorn and K. Schubert
1531-1536
Technical Paper
Thermal stability of electrodeposited LIGA Ni–W alloys for high temperature MEMS applications
M. Haj-Taieb, A. S. M. A. Haseeb, J. Caulfield, K. Bade and J. Aktaa, et al.
1537-1540
Technical Paper
Ni electroplating on a resist micro-machined by proton beam writing
Naoyuki Uchiya, Yusuke Furuta, Hiroyuki Nishikawa, Tohru Watanabe and Junji Haga, et al.
1541-1544
Technical Paper
High aspect ratio glass structures produced by means of the drawing technology
A. Hesse, S. Mrotzek, D. Hülsenberg and E. Rädlein
1545-1551
Technical Paper
Modelling of the filling of micro-cavities of finite geometry by amorphous polymers using hot-embossing
M. Sahli, C. Roques-Carmes, C. Khan Malek and J. C. Gelin
1553-1557
Technical Paper
Control of the quality of laser surface texturing
Christophe Vincent, Guy Monteil, Thierry Barriere and Jean Claude Gelin
1559-1565
Technical Paper
Development of lighting panel comprising light tube fabricated by LIGA process
Yoshitaka Sawa, Takanori Tanaka, Takeshi Kitadani, Hiroshi Ueno and Koichi Itoigawa, et al.
1567-1572
Technical Paper
Polytetrafluoroethylene processing characteristics using high-energy X-ray
Yoshiaki Ukita, Kazuhiro Kanda, Shinji Matsui, Mitsuyoshi Kishihara and Yuichi Utsumi
1573-1579
Technical Paper
Enzyme-linked immunosorvent assay using vertical microreactor stack with microbeads
Yoshiaki Ukita, Toshifumi Asano, Kuniyo Fujiwara, Katsuhiro Matsui and Masahiro Takeo, et al.
1581-1588
Technical Paper
Experimental characterization of transcription properties of microchannel geometry fabricated by injection molding based on Taguchi method
Dong Sung Kim, Jong Sun Kim, Young Bae Ko, Jong Deok Kim and Kyung Hwan Yoon, et al.
1589-1592
Technical Paper
Fabrication and test of multilayer microcoils with a high packaging density
C. Ruffert and H. H. Gatzen
1593-1597
Technical Paper
Study on demolding temperature in thermal imprint lithography via finite element analysis
Zhichao Song, Byoung Hee You, Jaejong Lee and Sunggook Park
1599-1605
Technical Paper
Replication technologies for HARM devices: status and perspectives
V. Piotter, W. Bauer, T. Hanemann, M. Heckele and C. Müller
1607-1612
Technical Paper
Investigations of SU-8 removal from metallic high aspect ratio microstructures with a novel plasma technique
Rainer Engelke, Josef Mathuni, Gisela Ahrens, Gabi Gruetzner and Martin Bednarzik, et al.
1613-1619
Technical Paper
Fabrication of antiscatter grids and collimators for X-ray and gamma-ray imaging by lithography and electroforming
Olga V. Makarova, Guohua Yang, Platte T. Amstutz and Cha-Mei Tang
1621-1626
Technical Paper
De-tethering of high aspect ratio metallic and polymeric MEMS/NEMS parts for the direct pick-and-place assembly of 3D microsystem
Karthik S. Colinjivadi, Yonghao Cui, Matthew Ellis, George Skidmore and Jeong-Bong Lee
1627-1633
Technical Paper
Viable cell handling with high aspect ratio polymer chopstick gripper mounted on a nano precision manipulator
Karthik S. Colinjivadi, Jeong-Bong Lee and Rockford Draper
1635-1639
Technical Paper
Application of micro structured photosensitive glass for the gravure printing process
U. Brokmann, K. Sönnichsen and D. Hülsenberg
1641-1646
Technical Paper
Shape controllable micro-nozzle fabrication
KyungNam Kang, Yoonyoung Jin, Jost Goettert and Pratul K. Ajmera
1647-1655
Technical Paper
Microcasting of Al bronze: influence of casting parameters on the microstructure and the mechanical properties
Gundi Baumeister, Brando Okolo and Joachim Rögner
1657-1661
Technical Paper
Fabrication and performance of 2-D compound X-ray refractive lenses
Suk-Sang Chang, Jin-Pyoung Lee, Guk-Bae Kim, Sang-Joon Lee and Jong-Hyun Kim
1663-1667
Technical Paper
Rapid replication of powder composite high-aspect-ratio microstructures using silicone rubber micromolds
Guohua Yang, Olga V. Makarova, Platte Amstutz and Cha-Mei Tang
1669-1674
Technical Paper
Manufacturing process for high aspect ratio metallic micro parts made by electroplating on partially conductive templates
J. Prokop, G. Finnah, J. Lorenz, V. Piotter and R. Ruprecht, et al.
1675-1681
Technical Paper
Extreme aspect ratio NiFe gear wheels for the production of commercially available Micro Harmonic Drive® gears
Bernd Loechel, Jost Goettert, Gabi Gruetzner, Martin Bednarzik and Christoph Waberski, et al.
1683-1688
Technical Paper
Soft X-ray lithography of high aspect ratio SU8 submicron structures
Elena Reznikova, Juergen Mohr, Martin Boerner, Vladimir Nazmov and Peter-Juergen Jakobs
1689-1694
Technical Paper
Nickel stamp fabrication and hot embossing for mass-production of micro/nano combined structures using anodic aluminum oxide
Jang Min Park, Nam Hyo Kim, Bong-Kee Lee, Kun-Hong Lee and Tai Hun Kwon
1695-1698
Technical Paper
3-D PTFE microstructure fabricated using synchrotoron radiation etching
Mitsuhiro Horade, Sommawan Khumpuang and Susumu Sugiyama
1699-1700
Technical Paper
Polyether ether ketone microstructures for chemical analytics
W. Hwang, H. Mühlberger, W. Hoffmann, A. E. Guber and V. Saile
1701-1708
Technical Paper
Sidewall slopes and roughness of SU-8 HARMST
K. D. Vora, B.-Y. Shew, B. Lochel, E. C. Harvey and J. P. Hayes, et al.
1709-1714
Technical Paper
Stiction issues and actuation of RF LIGA-MEMS variable capacitors
Darcy T. Haluzan, David M. Klymyshyn, Martin Börner, Sven Achenbach and Garth Wells, et al.
1715-1719
Technical Paper
Submicron-scale surface acoustic wave resonators fabricated by high aspect ratio X-ray lithography and aluminum lift-off
Sven Achenbach, David Klymyshyn, Timo Mappes, Anton Kachayev and Venkat Subramanian, et al.
1721-1725
Technical Paper
Submicron polymer structures with X-ray lithography and hot embossing
Timo Mappes, Matthias Worgull, Mathias Heckele and Jürgen Mohr
1727-1729
Technical Paper
Measurement of side walls of high aspect ratio microstructures
M. Simon, E. Reznikova, V. Nazmov and A. Last
1731-1737
Technical Paper
Microscale molding replication of Cu- and Ni-based structures
J. Jiang, Fanghua Mei, W. J. Meng and E. Lara-Curzio
1739-1744
Technical Paper
Fabrication method of two-level polymeric microstructure with the help of deep X-ray lithography
Bong-Kee Lee and Tai Hun Kwon
1745-1750
Technical Paper
Fabrication of comb-drive micro-actuators based on UV lithography of SU-8 and electroless plating technique
Wen Dai and Wanjun Wang
1751-1756
Technical Paper
Design and fabrication of an electrochemically actuated microvalve
Dong Eun Lee, Steve Soper and Wanjun Wang
1757-1764
Technical Paper
High aspect ratio micro tool manufacturing for polymer replication using μEDM of silicon, selective etching and electroforming
G. Tosello, G. Bissacco, P. T. Tang, H. N. Hansen and P. C. Nielsen
1765-1770
Technical Paper
Mixer slit plates fabricated by direct-LIGA
Martin Bednarzik, Christoph Waberski, Ivo Rudolph, Bernd Löchel and Frank Herbstritt, et al.
1771-1775
Technical Paper
Design and manufacturing of micro milling tools
J. Fleischer, M. Deuchert, C. Ruhs, C. Kühlewein and G. Halvadjiysky, et al.
1777
Erratum
Sidewall slopes and roughness of SU-8 HARMST
K. D. Vora, B.-Y. Shew, B. Lochel, E. C. Harvey and J. P. Hayes, et al.