1777-1783
Technical Paper
Multi-objective decision support system in numerical reliability optimization of modern electronic packaging
Łukasz Dowhań, Artur Wymysłowski and Rainer Dudek
1785-1791
Technical Paper
Static and dynamic stabilities of a microbeam actuated by a piezoelectric voltage
Ghader Rezazadeh, Mohammad Fathalilou and Rasul Shabani
1793-1802
Technical Paper
Design of micro-retainer to counter-balance spinning seismic proof mass
Nan-Chyuan Tsai, Bing-Hong Liou and Chih-Che Lin
1803-1814
Technical Paper
Compensation to imperfect fabrication and asymmetry of micro-gyroscopes by using disturbance estimator
Nan-Chyuan Tsai and Chung-Yang Sue
1815-1826
Technical Paper
Design, fabrication and analysis of micromachined high sensitivity and 0% cross-axis sensitivity capacitive accelerometers
Hamed Farahani, James K. Mills and William L. Cleghorn
1827-1834
Technical Paper
A methodology for quantitative evaluation of local electrical conductivity: from micron to submicron
Bing-Feng Ju and Lei Wu
1835-1844
Technical Paper
Miniaturization limits of piezoresistive MEMS accelerometers
Manuel Engesser, Axel R. Franke, Matthias Maute, Daniel C. Meisel and Jan G. Korvink
1845-1853
Technical Paper
Fabrication of optically smooth, through-wafer silicon molds for PDMS total internal reflection-based devices
Nam Cao Hoai Le, Dzung Viet Dao, Ryuji Yokokawa, John C. Wells and Susumu Sugiyama
1855-1860
Technical Paper
Simulating the laser micromachining of a 3D flexible structure
Richárd Berenyi
1861-1872
Technical Paper
An evaluation of process-parameter and part-geometry effects on the quality of filling in micro-injection moulding
Usama M. Attia and Jeffrey R. Alcock
1873-1877
Technical Paper
Thermal assisted direct bonding between structured glasses for lab-on-chip technology
Qiuping Chen, Qiuling Chen, Daniel Milanese and Monica Ferraris
1879-1884
Technical Paper
A nano-metrology system with a two-dimensional combined optical and X-ray interferometer and an atomic force microscope
Jinwon Park, Moo-Yeon Lee and Dong-Yeon Lee
1885-1896
Technical Paper
Design and fabrication of an electrostatically suspended microgyroscope using UV-LIGA technology
Feng Cui, Wenyuan Chen, Weiping Zhang, Qijun Xiao and Gaoyin Ma, et al.
1897
Erratum
Erratum to: Nonsingular dislocation and crack fields: implications to small volumes
J. Kioseoglou, I. Konstantopoulos, G. Ribarik, G. P. Dimitrakopulos and E. C. Aifantis