1673-1681
Review Paper
A comparative study on MEMS piezoelectric microgenerators
Aliza Aini Md Ralib, Anis Nurashikin Nordin and Hanim Salleh
1683-1689
Review Paper
Review of atomic MEMS: driving technologies and challenges
Haifeng Dong, Jiancheng Fang, Binquan Zhou, Jie Qin and Shuangai Wan
1691-1697
Technical Paper
Novel no-moving-part valves for microfluidic devices
Kai-Shing Yang, Ing-Youn Chen, Chi-Chuan Wang and Jin-Cherng Shyu
1699-1704
Technical Paper
Thermal analysis of helium-filled enterprise disk drive
Jiaping Yang, Cheng Peng Henry Tan and Eng Hong Ong
1705-1711
Technical Paper
An effective microsystem by design of a twin-plate tool for precision removal
P. S. Pa
1713-1717
Technical Paper
RF–DC power conversion of Schottky diode fabricated on AlGaAs/GaAs heterostructure for on-chip rectenna device application in nanosystems
Farahiyah Mustafa, Norfarariyanti Parimon, Abdul Manaf Hashim, Shaharin Fadzli Abd Rahman and Abdul Rahim Abdul Rahman, et al.
1719-1725
Technical Paper
Fabrication and performance assessment of a novel stress sensor applied for micro-robotics
Yu-Ming Huang, Nan-Chyuan Tsai and Jing-Yao Lai
1727-1734
Technical Paper
Simplified model of Reynolds equation with linearized flow rate for ultra-thin gas film lubrication in hard disk drives
Bao-Jun Shi and Ting-Yi Yang
1735-1739
Technical Paper
Thin-film sensor based tip-shaped split ring resonator metamaterial for microwave application
Xun-jun He, Yue Wang, Jian-min Wang and Tai-long Gui
1741-1747
Technical Paper
Effects of lubrication conditions on micro deep drawing
Feng Gong, Bin Guo, Chun Ju Wang and De Bin Shan
1749-1755
Technical Paper
Bio-mass sensor using an electrostatically actuated microcantilever in a vacuum microchannel
Yasser Aboelkassem, Ali H. Nayfeh and Mehdi Ghommem
1757-1763
Technical Paper
Numerical study of the effect on mixing of the position of fluid stream interfaces in a rectangular microchannel
M. A. Ansari, Kwang-Yong Kim and Sun Min Kim
1765-1769
Technical Paper
A continuous-membrane micro deformable mirror based on anodic bonding of SOI to glass wafer
Da-Yong Qiao, Song-Jie Wang and Wei-Zheng Yuan
1771-1775
Technical paper
Piezoelectric micromachined ultrasonic transducer based on dome-shaped piezoelectric single layer
J. Peng, C. Chao and H. Tang
1777-1786
Technical Paper
Numerical investigation of the structure of a silicon six-wafer micro-combustor under the effect of hydrogen/air ratio
Lin Zhu, Tien-Chien Jen, Ying-Feng Ji, Cheng-Long Yin and Mei Zhu
1787-1801
Technical Paper
Study on the replication quality of micro-structures in the injection molding process with dynamical tool tempering systems
Sascha Kuhn, August Burr, Michael Kübler, Matthias Deckert and Christoph Bleesen
1803-1809
Technical Paper
Slotted capacitive microphone with sputtered aluminum diaphragm and photoresist sacrificial layer
Bahram Azizollah Ganji and Burhanuddin Yeop Majlis
1811-1819
Technical Paper
Double-disk rotating viscous micro-pump with slip flow
Khaled M. Bataineh, Moh’d A. Al-Nimr and Suhil M. Kiwan
1821-1824
Technical Paper
Manufacturing process and thermal characterization of a fast temperature switching microdevice for real-time biological experiments
Frederic Gillot, Hideyuki F. Arata, Fabrice O. Morin and Hiroyuki Fujita
1825-1830
Technical Paper
A three phase serpentine micro electrode array for AC electroosmotic flow pumping
Kongying Xie, Yongjun Lai, Xin Guo and Rob J. Campbell