• 909-918

  Technical Paper

  Analytical method of predicating the instabilities of a micro arch-shaped beam under electrostatic loading

  Yin Zhang, Yisong Wang and Zhihong Li

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• 919-924

  Technical Paper

  A low voltage vertical comb RF MEMS switch

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• 925-930

  Technical Paper

  Effect of nitrogen doping on piezoresistive properties of a-Si_xC_y thin film strain gauges

  M. A. Fraga, H. Furlan, M. Massi and I. C. Oliveira

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• 931-940

  Technical Paper

  A miniature in-plane piezoresistive MEMS accelerometer for detection of slider off-track motion in hard disk drives

  Yanhui Yuan, Hejun Du and Shao Wang

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• 941-946

  Technical Paper

  Fabrication of the plastic component for photonic crystal using micro injection molding

  Ching-Ho Chang and Wen-Bin Young

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• 947-954

  Technical Paper

  Modeling of micro/nano particle separation in microchannels with field-flow fractionation

  Minghao Song, Hongwei Sun, Majid Charmchi, Pengtao Wang and Zongqin Zhang, et al.

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• 955-959

  Technical Paper

  Single-walled carbon nanotube network/poly composite thin film for flow sensor

  Hui Cao, Zhiyin Gan, Qiang Lv, Han Yan and Xiaobin Luo, et al.

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• 961-966

  Technical Paper

  Non-resonant electromagnetic wideband energy harvesting mechanism for low frequency vibrations

  Bin Yang and Chengkuo Lee

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• 967-971

  Technical Paper

  MEMS_DSC: a new device for microcalorimetric analysis in the biological field

  S. Maggiolino, N. Scuor, R. L. Mahajan and O. Sbaizero

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• 973-978

  Technical Paper

  Axial and shear fracture strength evaluation of silicon microneedles

  Puneet Khanna, Kevin Luongo, Joel A. Strom and Shekhar Bhansali

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• 979-992

  Technical Paper

  Dynamic characterization and modification of dynamic properties of a micro scanner

  Ilgar Veryeri and Ipek Basdogan

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• 993-1000

  Technical Paper

  Dynamic actuation and sensing micro-device for mechanical response of cultured adhesive cells

  Ken-ichi Konno, Tadashi Kosawada, Masato Suzuki, Takeshi Nakamura and Zhonggang Feng, et al.

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• 1001-1008

  Technical Paper

  Fabrication of a surface stress-based PDMS micro-membrane biosensor

  Shengbo Sang and Hartmut Witte

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• 1009-1013

  Technical Paper

  Effect of physical vapor deposition metallic thin films on micro injection molded weld line mechanical properties

  Lei Xie, Monika Leester-Schädel, Gerhard Ziegmann and Stephanus Büttgenbach

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• 1015-1020

  Technical Paper

  Monolithic micro-fabrication of Si micro-electro-mechanical structure with GaN light emitting diode

  R. Ito, M. Wakui, H. Sameshima, F.-R. Hu and K. Hane

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• 1021-1034

  Technical Paper

  Optimization of thermal fly-height control slider geometry for Tbit/in² recording

  Antonis I. Vakis and Andreas A. Polycarpou

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