Special issue of the 8th International Workshop on High Aspect Ratio Micro Structure Technology, HARMST 2009
1285
Editorial
Special issue of the 8th International Workshop on High Aspect Ratio Micro Structure Technology, HARMST 2009
Sven Achenbach, David Klymyshyn and Bernd Michel
1287-1292
Technical Paper
First automated production line for X-ray-LIGA (FELIG) is brought on line
Lothar Hahn, Georg Schwartz, Volker Saile and Joachim Schulz
1293-1298
Technical Paper
Synchrotron laboratory for micro and nano devices: facility concept and design
Sven Achenbach, Venkat Subramanian, David Klymyshyn and Garth Wells
1299-1302
Technical Paper
Polyimide-based X-ray masks with advanced performance of pattern accuracy and thermal stability
Seichin Kinuta, Yoshiaki Saita, Masashi Kobayashi, Martin Boerner and Volker Saile, et al.
1303-1307
Technical Paper
Fabrication of X-rays mask with carbon membrane for diffraction gratings
Naoki Takahashi, Hiroshi Tujii, Megumi Katori, Kenji Yamashita and Daiji Noda, et al.
1309-1313
Technical Paper
Fabrication of high precision X-ray mask for X-ray grating of X-ray Talbot interferometer
Daiji Noda, Hiroshi Tsujii, Naoki Takahashi and Tadashi Hattori
1315-1321
Technical Paper
Fabrication of X-ray imaging zone plates by e-beam and X-ray lithography
Longhua Liu, Gang Liu, Ying Xiong, Jie Chen and Wenjie Li, et al.
1323-1330
Technical Paper
Inclination of mold pattern’s sidewalls by combined technique with photolithography at defocus-positions and electroforming
Harutaka Mekaru, Osamu Koizumi, Akihisa Ueno and Masaharu Takahashi
1331-1338
Technical Paper
Study on fabrication of 3-D microstructures by synchrotron radiation based on pixels exposed lithography
Mitsuhiro Horade and Susumu Sugiyama
1339-1346
Technical Paper
Resist-less patterning on SiO2 by combination of X-ray exposure and vapor HF etching
Harutaka Mekaru, Makoto Fujimaki, Koichi Awazu and Masaharu Takahashi
1347-1351
Technical Paper
Method development for epoxy resin analysis
Sawa Nordt, Harald Pasch and Wolfgang Radke
1353-1359
Technical Paper
Electroplating of nickel films at ultra low electrolytic temperature
Chen-Kuei Chung, W. T. Chang and S. T. Hung
1361-1367
Technical paper
Electropolishing as a method for deburring high aspect ratio nickel RF MEMS
Stephanie Kissling, Klaus Bade, Martin Börner and David M. Klymyshyn
1369-1375
Technical Paper
Fabrication of high hardness Ni mold with electroless nickel–boron thin layer
Yoshitaka Sawa, Kenji Yamashita, Takeshi Kitadani, Daiji Noda and Tadashi Hattori
1377-1383
Technical Paper
High aspect ratio micromolds for the electroplating of micro electro discharge machining tools
Ornwasa Traisigkhachol and Hans H. Gatzen
1385-1392
Technical Paper
Development of separated micromold system for an efficient replication of high aspect ratio microstructures
Bong-Kee Lee and Tai Hun Kwon
1393-1398
Technical Paper
A polymer-metal hybrid flexible mould and application for large area hot roller embossing
Xuechuan Shan, L. Jin, Y. C. Soh and C. W. Lu
1399-1411
Technical Paper
3D UV-microreplication using cylindrical PDMS mold
Dongkeon Lee, Harutaka Mekaru, Hiroshi Hiroshima, Sohei Matsumoto and Toshiro Itoh, et al.
1413-1418
Technical Paper
How mold inserts influence the replication of metallic microparts produced by electroplating into two-component templates
Juergen Prokop, Jochen Heneka, Julia Lorenz, Kai Moehwald and Volker Piotter, et al.
1419-1423
Technical Paper
Ceramic micro parts produced by micro injection molding: latest developments
Tobias Müller, Volker Piotter, Klaus Plewa, Markus Guttmann and Hans-Joachim Ritzhaupt-Kleissl, et al.
1425-1430
Technical Paper
Theoretical and experimental characterization of wettability of various nanolens arrayed polymer surfaces replicated with nanodimpled aluminum mold insert
Jihoon Yeo, Jejun Ryu, Bong-Kee Lee, Euihyeon Byeon and Tai Hun Kwon, et al.
1431-1437
Technical Paper
Fabrication of micro-capacitive inclination sensor by resin molding
Hiroaki Miyake, Kazufumi Nishimoto, Satoshi Nishida, Daiji Noda and Tadashi Hattori
1439-1444
Technical Paper
Molding and hot forming techniques for fabricating plastic aspheric lenses with high blue-light transmittance
Kuo-Yung Hung, Yi-Ko Chen, Shih-Hao Huang and Der-Chi Shye
1445-1450
Technical Paper
Applying SU-8™ to the fabrication of micro electro discharge machining electrodes
Ornwasa Traisigkhachol, Hermann Schmid, Marc Wurz and Hans H. Gatzen
1451-1456
Technical Paper
Effect of oxalic acid concentration on the formation of anodic aluminum oxide using pulse anodization at room temperature
Chen-Kuei Chung, T. Y. Liu and W. T. Chang
1457-1463
Technical Paper
The effect of the aspect ratio on the hydrophobicity of microstructured polydimethylsiloxane (PDMS) robust surfaces
Jihoon Yeo and Dong Sung Kim
1465-1470
Technical Paper
Immunoassay using poly-tetrafluoroethylene microstructure in organic solvent
Yoshiaki Ukita, Saki Kondo, Chiwa Kataoka, Masahiro Takeo and Seiji Negoro, et al.
1471-1477
Technical Paper
Fast replication of out-of-plane microlens with polydimethylsiloxane and curable polymer (NOA73)
Guocheng Shao, Weiping Qiu and Wanjun Wang
1479-1483
Technical Paper
Fabrication of microcoils with narrow and high aspect ratio coil lines
Daiji Noda, Masaru Setomoto, Yuki Kobayashi and Tadashi Hattori
1485-1493
Technical Paper
Manufacture of microfluidic glass chips by deep plasma etching, femtosecond laser ablation, and anodic bonding
S. Queste, R. Salut, S. Clatot, J.-Y. Rauch and Chantal G. Khan Malek
1495-1500
Technical Paper
Direct bonding of PFTF sheets assisted by shynchrotron radiation induced surface modification
Yuichi Utsumi, Shigeaki Yamamoto, Tomoyuki Kuroki and Masaaki Okubo
1501-1506
Technical Paper
Solvent-assisted low pressure room temperature lamination of low temperature cofirable ceramic green tapes for formation of embedded micro channels
Xuechuan Shan, H. P. Maw and C. W. Lu
1507-1512
Technical Paper
A vibrating micro-scale CMM probe for measuring high aspect ratio structures
James D. Claverley and Richard K. Leach
1513-1516
Technical Paper
Thickness measurement in ultrathick multilayer microstructures
Rainer Engelke and Uwe Richter
1517-1527
Technical Paper
Methods for simulating and optimizing molded micro components and systems
Albert Albers, Hans-Georg Enkler and Pablo Leslabay
1529-1535
Technical Paper
Micro gear validation: improving the correlation between virtual and physical testing
Albert Albers, Peter Börsting, Tobias Deigendesch, Hans-Georg Enkler and Pablo Leslabay
1537-1545
Technical Paper
Patterns for design in microtechnology
Albert Albers, Tobias Deigendesch, Tarak Turki and Tobias Müller
1547-1551
Technical Paper
In situ diagnostic capabilities for beam position and beam intensity monitoring at SyLMAND
Venkat Subramanian, Sven Achenbach, David Klymyshyn, Garth Wells and Wade Dolton, et al.
1553-1561
Technical Paper
Development of a biological detection platform utilizing a modular microfluidic stack
Niklas Frische, Proyag Datta and Jost Goettert
1563-1567
Technical Paper
Design and microfabrication of a polymer membrane-based submicron scale electrophoretic flow detector for biomedical applications
Manouchehr Hashemi, Sven Achenbach, David Klymyshyn, Banafsheh Moazed and Jeremy Lee
1569-1576
Technical Paper
Design, fabrication, and test of an on-chip micro flow cytometer with integrated out-of-plane microlenses
Guocheng Shao and Wanjun Wang
1577-1580
Technical Paper
Vertical liquid transportation through capillary bundle structure using centrifugal force
Saki Kondo, Tsukasa Azeta, Yoshiaki Ukita and Yuichi Utsumi
1581-1587
Technical Paper
Micro gear pump with internal electromagnetic drive
Andreas Waldschik and Stephanus Büttgenbach
1589-1594
Technical Paper
Micro liquid rotor operated by surface-acoustic-wave
Tsunemasa Saiki, Katsuhide Okada and Yuichi Utsumi
1595-1600
Technical Paper
Design and mixing efficiency of rhombic micromixer with flat angles
C. K. Chung, T. R. Shih, B. H. Wu and C. K. Chang
1601-1607
Technical Paper
Hot embossing of poly(lactic acid) films for an embedded cochlear implant stiffener
R. Tewari and C. Friedrich
1609-1617
Technical Paper
Easily manageable, electrothermally actuated silicon micro gripper
B. Hoxhold and S. Büttgenbach
1619-1624
Technical Paper
Fabrication of cone-like microstructure using UV LIGA-like for light guide plate application
C. K. Chung, K. L. Sher, Y. J. Syu and C. C. Cheng
1625-1631
Technical Paper
Fabrication of UV range light guide plate
Yuta Okayama, Kenji Yamashita, Yoshitaka Sawa, Daiji Noda and Tadashi Hattori
1633-1641
Technical Paper
Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for space X-ray telescopes
Yuichiro Ezoe, Ikuyuki Mitsuishi, Utako Takagi, Masaki Koshiishi and Kazuhisa Mitsuda, et al.
1643-1647
Technical Paper
Thermal-deformation analysis of a polymer micro-mirror optical device
Kuo-Yung Hung, Chun-Der Cheng and Ying-Chuan Chen
1649-1655
Technical Paper
Research on electrostatic actuator polymer thin-film for controlling light scattering phenomena
Kuo-Yung Hung, Yun-Ju Chuang, T. H. Liao, Der-Chi Shye and Shih-Hao Huang
1657-1663
Technical Paper
A wireless powered fully integrated SU-8-based implantable LC transponder
Sung-Hoon Cho, Sang-Hee Son, Hoon-Ju Chung and Jeong-Bong Lee
1665-1671
Technical Paper
RMS voltage sensor based on a variable parallel-plate capacitor made of electroplated copper
Jan Dittmer, Lars Hecht, Rolf Judaschke and Stephanus Büttgenbach