In this study, Si-nanoparticle(NP)/Si-nanowire(NW)-based field-effect transistors (FETs) with a top-gate geometry were fabricated
and characterized. In these FETs, Si NPs were embedded as localized trap sites in Al
2O
3 top-gate layers coated on Si NW channels. Drain current versus drain voltage (
I
DS−
V
DS) and drain current versus gate voltage (
I
DS−
V
GS) were measured for the Si NP/Si NW-based FETs to investigate their electrical and memory characteristics. The Si NW channels
were depleted at
V
GS = 9 V, indicating that the devices functioned as
p-type depletion-mode FETs. The top-gate Si NW-based FETs decorated with Si NPs show counterclockwise hysteresis loops in the
I
DS−
V
GS curves, revealing their significant charge storage effect.