Special Issue on Electroceramics in Micro-Electro-Mechanical Systems
5-6
Editorial Introduction
Editorial
N. Setter
7-17
Thin Film Piezoelectrics for MEMS
S. Trolier-McKinstry and P. Muralt
19-32
Electroceramic Thick Film Fabrication for MEMS
R.A. Dorey and R.W. Whatmore
33-51
Microfabrication of Piezoelectric MEMS
J. Baborowski
53-68
Submicrometer-Scale Patterning of Ceramic Thin Films
C.R. Martin and I.A. Aksay
69-88
Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics
M. Alexe, C. Harnagea and D. Hesse
89-100
Piezoelectric Microactuator Devices
R. Maeda, J.J. Tsaur, S.H. Lee and M. Ichiki
101-108
Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films
P. Muralt and J. Baborowski
109-118
RF Bulk Acoustic Wave Resonators and Filters
H.P. Loebl, C. Metzmacher, R.F. Milsom, P. Lok and F. van Straten, et al.
119-131
Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices
O. Auciello, S. Saha, D.Y. Kaufman, S.K. Streiffer and W. Fan, et al.
133-144
MEMS for Optical Functionality
S. Kim, G. Barbastathis and H.L. Tuller