Advances in Mass Data Analysis of Signals and Images in Medicine, Biotechnology and Chemistry
Lecture Notes in Computer Science, 2007, Volume 4826/2007, 80-83, DOI: 10.1007/978-3-540-76300-0_8

Combinatorial Synthesis of Thin Mixed Oxide-Films and Examinations of Their Piezoelectricity by Ultrasonic Piezo-Mode Imaging

Daniela Rende, Wilhelm F. Maier, Kerstin Schwarz, Ute Rabe and Walter Arnold

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Abstract

The development of an automated production of thin films and the characterization of their piezoelectric properties in high-throughput is desc-ribed. A library of 50 undoped as well as doped lead zirconate titanate Pb(Zr,Ti)O3 (PZT) coatings was produced by sol deposition. Afterwards, the piezoelectric properties of the library films were analyzed by automated atomic force microscopy employing the ultrasonic piezo-mode.

Keywords  PZT - combinatorial chemistry - high throughput - sol-gel synthesis - AFM

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