We present an overview of the Epilift technique, which allows the fabrication of single-crystal silicon films, suitable for
photovoltaic purposes. Epitaxial layers are grown by liquid phase epitaxy on partially masked, single-crystal silicon substrates.
The layers are detached from the substrate by selective chemical or electrochemical etching, allowing the substrate to be
re-used. Epilayers grown on (100) substrates display highly textured surfaces as well as narrow overgrowth widths of the epitaxial
layer over the oxide, making them particularly suitable for photovoltaic devices.
PACS: 84.60Jt; 81.15Lm; 81.05Cy
Received: 1 March 1999 / Accepted: 28 March 1999 / Published online: 1 July 1999