Nitride-based light-emitting diodes (LEDs) with Si-doped n
+-In
0.23Ga
0.77N/GaN short-period superlattice (SPS) tunneling contact top layer were fabricated. It was found that although the measured
specific-contact resistance is around 1 × 10
−2 Ω-cm
2 for samples with an SPS tunneling contact layer, the measured specific-contact resistance is around 1.5×10
0 Ω-cm
2 for samples without an SPS tunneling contact layer. Furthermore, it was found that one could lower the LED-operation voltage
from 3.75 V to 3.4 V by introducing the SPS structure. It was also found that the LED-operation voltage is almost independent
of the CP
2Mg flow rate when we grow the underneath p-type GaN layer. The LED-output intensity was also found to be larger for samples
with the SPS structure.
Key words InGaN/GaN - short-period superlattice (SPS) - multiple-quantum well (MQW) - light-emitting diode (LED)