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Fumihiko Kimura and Kenichiro Horio
i-xiii
Front matter
1-27
Part 1 / Keynote Papers
1-9
Merging Technologies for Optics
11-19
Fast Tool Servos: Advances in Precision, Acceleration, and Bandwidth
21-27
Microsystem Technologies for Automotive Applications
Part 2 / Full Papers
29-52
A1 / Design
29-34
System Concept and Innovative Component Design for Ultra-Precision Assembly Processes
35-40
Development of a Design Tool for Machine Tools Combining Conceptual Design Support and Detail Design Method
41-46
Precision Contouring Control of Multi-Axis Feed Drive Systems
47-52
Areal Gear Flank Description as a Requirement for Optical Gear Metrology
53-70
A2 / System
53-57
Detecting Perturbation Occurrence during Walking
59-63
Supporting the Reuse of Parts Based on Operation Histories of Products and Preference of Consumers
65-70
Multi-objective Reactive Scheduling Based on Genetic Algorithm
71-93
A3 / Measurement
71-76
Ultraprecision Wide-angle Profile Measurement with Air-bearing Cylinder Slant Probes
77-82
Development of a Laser-Guided Deep-Hole Measuring System: Autocollimation System
83-88
Development of an Optical Measuring Device for Rotation Accuracy of Micro-Spindle —Application to Measurements of a High-Speed Spindle—
89-93
Laser Interferometric Measurement of Involute Profile by Rolling of Artifact
95-116
A4 / Actuator
95-100
Study on Manufacturing Method to Reduce Cogging Torque of Motor with Separate Core
101-106
A High Power and Precision Ultrasonic Linear Motor with Lateral Flexible Supports
107-112
A Precise Motion Measurement of a Miniature Robot Driven by the Deformation of Piezoelectric Actuators
113-116
Development of IVUS (Intravascular Ultrasound) Driven by Ultrasonic Micromotor —Principle of Drive and Detection Methods—
117-132
A5 / Precise mechanism
117-120
Development of Membrane Driven Micropump —Principle of Microbubble Driving Mechanism and Prototype—
121-126
A 3-DOF Rotational Precision Positioning Stage using Spring-mounted PZT Actuators
127-132
Active Damping of a Wafer Loading Robot using Piezoceramic Actuators
133-150
A6 / Control/Sensing
133-137
Visual Feedback Control of a Micro Lathe
139-144
An 8-Axis Robot Based Rough Cutting System for Surface Sculpturing
145-150
A New Position Surveying System for the Underground Pipes Using Two Rotary Encoders
151-174
A7 / Machine tools
151-156
Measurement of Cutting Torque by Speed Increasing Spindle
157-161
Diamond Turning using Water Drive Spindle
163-167
Development and Evaluation of a High-Precision Machining Center with Friction-Less Drives
169-174
Machining Feature-Driven 5-Axis CNC Machine Tools
175-196
B1 / Micro structure
175-179
Selective Anodising Technologies for Obtaining Translucent Micro Structures
181-186
Development of Rectangular Microblasting Nozzle
187-190
Thick SU-8 Mask for Micro Channeling of Glass by using Micro Abrasive Jet Machining
191-196
Fabrication of Self-assembled Microstructure using Controlled Liquid Spreading on Textured Surface
197-219
B2 / Micro/Nano manipulation
197-201
Improving Performance of Direct Photosynthetic/Metabolic Micro Bio Fuel Cell (DPBFC) by Gene Manipulation of Bacteria
203-207
Nanometer Deflection Control of AFM Probe by Irradiating Polarized Laser and its Application to Nano-Structuring Process
209-213
Investigation on Fabricating 3D Structures Using Inkjet Printing Technology
215-219
Miniaturization of Dot Pattern by Metal Forming for Direct Marking of 2D Barcode Symbols
221-242
B3 / Plasma process
221-225
Plasma Etching Based Processes for the Fabrication of Micro Structured Linear Guide
227-231
Ultraprecision Finishing of Photomask Substrate by Utilizing Atmospheric Pressure Plasma
233-237
Development of Ultra Precision Finishing Method for Quartz Crystal Wafer Utilizing Atmospheric Pressure Plasma
239-242
Sub-nanometer Smoothing of Diamond-turned Metal Surfaces using Ion Beams
243-265
B4 / Laser process
243-248
Laser Machining of Cobalt Cemented Tungsten Carbides
249-254
Study of Thermal Deformation of a Base Sheet Caused by Laser Cutting
255-259
Laser Welding of Transparent Resin Plates
261-265
Fabrication of Carbon Nanotube Reinforced Hydroxyapatite Coating on Stainless Steel 316L by Laser Surface Treatment
267-280
B5 / Polishing/Finishing
267-270
Novel Abrasive-free Planarization of Si and SiC using Catalyst
271-275
Polishing of Single Crystal SiC with the LHA Pad
277-280
A Computational Study on Slurry Flow between a Wafer and CMP Pad with Grooves
281-300
B6 / Integrated process
281-284
Multilevel Computer Generated Hologram on a Curved Surface for High Power CO2 Laser Beam Shaping
285-290
Milling-Combined Laser Metal Sintering System and Production of Injection Molds with Sophisticated Functions
291-294
Development of Optical Elements with ELID-grinding and MRF Synergistic Finishing Process
295-300
Fabrication of Ultraprecisely Figured Mirror for Nano Focusing Hard-x-ray
301-318
B7 / Grinding
301-304
Surfaces Formation of Precision ELID Grinding Rock Minerals
305-307
Dressing of Coarse-Grained Diamond Wheels for Ductile Machining of Brittle Materials
309-313
Study on Subsurface Damage Generated in Ground Si Wafer
315-318
Fabrication of High-quality Surfaces on Precise Lens Mold Materials by a new ELID Grinding Wheel
Part 3 / Short Papers
319-324
Part 15 / Design
319-320
A GA-based Optimization of Compliant Micro-manipulator
321-322
Path Control Scheme for Vision Guided Micro Manipulation System
323-324
Machined Surface Analysis for 5-axis Machine Tools
325-328
Part 16 / System
325-326
A New Approach Manufacturing Cell Scheduling based on Skill-based Manufacturing Integrated to Genetic Algorithm
327-328
Slide-bending Formation of Thin Metal Sheet by Using an Industrial Robot
329-334
Part 17 / Machine
329-330
High Accuracy and High Capacity Motor Cooling System Using Phase Change of Refrigerant for Semiconductor Lithography Apparatus
331-332
Development of the Earthworm Robot using a Shape Memory Alloy
333-334
Improvement of Propulsion Mechanism based on the Inertial Force
335-338
Part 18 / Measurement
335-336
A High-order Spline Filter for Surface Roughness Measurement
337-338
Surface structure of monocrystalline silicon anisotropically etched with the help of microwaves
339-342
Part 19 / Novel Process
339-340
Development of an Ultra-Thin 100 μm Diametrical Coaxial Cable using a Coating Technique
341-342
Study on Si Wafer Cooling by Low Pressure Argon Gas in Vacuum Eenvironment
343-356
Part 20 / Process
343-344
Research on Development of Advanced Analyzer Components with Ultraprecision
345-346
Effects of Wear of Single Crystal Diamond Tool with Large Nose Radius on Work Hardening and Residual Stress
347-348
Experimental Analysis and Optimization of Cutting Parameters for End Milling Aluminium Alloy
349-350
Study on the ELID Grinding Forces of Ceramics and Steels
351-352
Grinding of C/C-SiC Composite in Dry Method
353-354
Micromachining Characteristics of Sapphire Surface with Fifth Harmonic Nd: YAG Lasers
355-356
Development of an Automatic Scraping Machine with Recognition for Bearing of Scraped Surfaces — Construction of Automatic Scraping Machine —
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