Lecture Notes in Computer Science, 2005, Volume 3637/2005, 215-226, DOI: 10.1007/11549703_21

Hardware Platforms for MEMS Gyroscope Tuning Based on Evolutionary Computation Using Open-Loop and Closed-Loop Frequency Response

Didier Keymeulen, Michael I. Ferguson, Wolfgang Fink, Boris Oks, Chris Peay, Richard Terrile, Yen Cheng, Dennis Kim, Eric MacDonald and David Foor

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Abstract

We propose a tuning method for MEMS gyroscopes based on evolutionary computation to efficiently increase the sensitivity of MEMS gyroscopes through tuning. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation We also report on the development of a hardware platform for integrated tuning and closed-loop operation of MEMS gyroscopes. The control of this device is implemented through a digital design on a Field Programmable Gate Array (FPGA). The hardware platform easily transitions to an embedded solution that allows for the miniaturization of the system to a single chip.

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