Fluoridated hydroxyapatite (FHA) has been successfully synthesized via sol-gel method with HPF₆ as the fluorine containing reagent. The chemical reactions induced by HPF₆ addition and the formation process of fluoridated hydroxyapatite (FHA) are investigated. The hydrolysis and alcoholysis of HPF₆ release F ion into the solution which, in turn, reacts with Ca ion to form nanocrystalline CaF₂ (nc-CaF₂). These nc-CaF₂ improves the gelation ability of the system through formation of F‒H hydrogen bonding between F in nc-CaF₂ and H in P precursors. Increasing HPF₆ leads to more nc-CaF₂ thus less Ca(NO₃)₂ in the dried gel, or the presence of nc-CaF₂ in the gel suppresses the formation of Ca(NO₃)₂. At elevated firing temperatures, the P containing groups react with each other to form condensed phosphate. These condensed calcium phosphate, nc-CaF₂/Ca(NO₃)₂, reacts with the rest of the amorphous phase to form FHA phase at above 400°C.