Journal of Low Temperature Physics
Volume 151, Numbers 1-2, 245-248, DOI: 10.1007/s10909-007-9639-8

Design and Fabrication of Absorber Coupled TES Microbolometers on Continuous Silicon-Nitride Windows

Clarence L. Chang, John E. Carlstrom, Aaron Datesman, Stephan S. Meyer, Valentyn Novosad, Volodymyr G. Yefremenko, Tom Crawford, Tom Downes, Jeff McMahon and Kathryn Miknaitis, et al.

From the issue entitled "Proceedings of the 12th International Workshop on Low Temperature Dectectors (LTD12)- Part I"

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Abstract

The implementation of TES based microbolometer arrays will achieve unprecedented sensitivities for mm and sub-mm astronomy through fabrication of large format arrays and improved linearity and stability arising from strong electro-thermal feedback. We report on progress in developing TES microbolometers using Mo/Au thin films and Au absorbing structures. We present measurements of suppressing the thermal conductance through the etching of features on a continuous Silicon-Nitride window.

Keywords  Bolometers - TES - Polarization

PACS  07.57.Kp - 95.55.Rg - 95.75.Hi

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