Electrostatic film based light modulators are discussed. Electrostatically driven microstructures can close or open parts of a transparent substrate modulating the incident light. The surface of the microstructures can be used as shutter or as mirror or simultaneously in both functions. Photolithography and thin film technologies have been used to build microshutter-micromirror arrays. Refractive, diffractive and micro-optical systems based on glasses or polymers can be combined with the presented arrays in integrated solutions. Finally a display integrated in an automotive instrument cluster is discussed.
The work has been performed at Centro Ricerche Fiat. This paper was presented at the Conference of Micro System Technologies 2001 in March 2001.