Machine tool vibration is one of the key factors affecting the machining quality in precision and ultra-precision cutting. Hybrid vibration control of slide carriage is discussed in this paper. An active air-actuator based on PZT is developed to control the transverse vibration of slide carriage in the process of movement. Mathematical model of slide carriage vibration control is given. By using the merits of both fuzzy control and PID control, the composite fuzzy-PID control method is adopted. The experimental results show that this method can reduce the vibration of slide carriage of ultra-precision machine tool effectively.