Volume 2008, Number 2, 112-121, DOI: 10.1134/S0036029508020055

Deposition from the two-phase multicomponent flow of a vacuum-arc plasma containing droplets of an evaporated material

S. A. Muboyadzhyan

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Abstract

The interaction of a surface with the two-phase flow of a multicomponent vacuum-arc plasma containing droplets of an evaporated material along with multicharged ions and neutral atoms is studied. For the two-phase flow of a multicomponent plasma, the dependences of the ion-current density, the deposition rate, and the heat flow to a substrate on the bias voltage are obtained, and the conditions at which the coating deposition rate is inverted are determined. A unique probe technique for the plasma flow generated by an end-face Hall plasma accelerator with a “cold” eroded cathode is used to determine the volt-equivalent energy U** of the interaction of the two-phase plasma flows of Ti, Al, Cr, and an Ni-Cr-Al-Y alloy with a surface and the self-sputtering coefficient of the Ni-Cr-Al-Y alloy and its elements (Ni, Cr, Al) as a function of the bias voltage. Metallographic analysis is used to study the structure of thick (∼100-μm) coatings deposited from the two-phase flow of a metallic multicomponent vacuum-arc plasma.

PACS number  52.30.-q

Original Russian Text © S.A. Muboyadzhyan, 2008, published in Metally, 2008, No. 2, pp. 26–37.

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