We developed a novel at-wavelength metrology for the surface figure of hard x-ray focusing mirrors. The metrology, which evaluates
the wave-front error of the focusing beam, is based on the numerical calculation of intensity distribution profiles around
the focal point. We demonstrated the atwavelength metrology of a total reflection mirror. The recovered phase error profile
of the test mirror using the atwavelength metrology was in good agreement with the profile measured using an optical interferometer.
This result indicates the effectiveness of the developed metrology. This technique is expected to be applied to manufacturing
processes for realizing diffraction-limited nano focusing optics.
Keywords hard X-ray mirror - X-ray nanofocusing - At-wavelength wave-front metrology - surface metrology