We propose a tuning method for Micro-Electro-Mechanical Systems (MEMS) gyroscopes based on evolutionary computation to increase
the accuracy of MEMS gyroscopes through electrostatic tuning. The tuning method was tested for the second generation JPL/Boeing
Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation. We
also report on the development and preliminary results of a hardware platform for integrated tuning based on “switched drive-angle”
of MEMS gyroscopes whereby the same gyro is operated with its drive direction first at 0° and then at 90°. The control of
this device is implemented through a digital design on a Field Programmable Gate Array (FPGA). The hardware platform easily
transitions to an embedded solution that allows for the miniaturization of the system to a single chip.
Key words MEMS - tuning - genetic algorithm - simulated annealing - FPGA