Nanocrystalline anatase (TiO₂) films were prepared at very low temperature through a sol-gel route using titanium isopropoxide and hydrogen peroxide in ethanol. Crystallization occurred after film deposition at 35°C in an atmosphere saturated with water vapor. Both thin and thick films of nanocrystalline anatase were prepared. Observed particle size in crystallized films is approximately 20–40 nm as measured with AFM. No residual organic material was apparent through FTIR after crystallization occurred. Dynamic light scattering studies performed on this system indicate that particle size measured in solution is strongly dependent on the amount of agitation samples received prior to measurement.