A half-wave thin film was formed on the facet of a proton-exchanged waveguide by the oblique deposition of Ta
2O
5. Planar-type butt coupling of the waveguide on the z-cut LiTaO
3 substrate to the AlGaAs laser diode in transverse electric mode oscillation was realized with coupling efficiency as high
as 53%.
Key words butt coupling - proton-exchanged waveguide - oblique deposition - thin film