View Related Documents

Abstract

Cadmium oxide films obtained by magnetron sputtering of a cadmium target in a nitrogenoxygen mixture are investigated. It is established that these films have a lower resistivity than do films obtained by other methods. It is concluded that the practical utilization of CdO films as transparent electrodes would be worthwhile.
S. A. Vekshinski $\overset{\lower0.5em\hbox{$\overset{\lower0.5em\hbox{ State Scientific-Research Institute of Vacuum Technology
Pis’ma Zh. Tekh. Fiz. 23, 70–74 (October 26, 1997)

Fulltext Preview

Image of the first page of the fulltext document