Two methods are currently used for heating substrates in metal-organic chemical vapor deposition (MOCVD): rf heating and quartz
lamp heating. This paper reports a new method, the quartz-envelope heater, and describes its use for producing undoped GaAs
with AsH
3 and TMG in an MOCVD system. Also discussed are growth-rate and morphological studies, variations of electrical properties
with different growth parameters, and refinements to the present heater design.
Key words heater design - epitaxial - gallium arsenide - metal-organic chemical vapor deposition - electrical properties - OMVPE