Volume 14, Number 5, 587-615, DOI: 10.1007/BF02654027

The quartz-envelope heater: A new heater for metal-organic chemical vapor deposition systems

S. I. Boldish, J. S. Ciofalo and J. P. Wendt

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Abstract

Two methods are currently used for heating substrates in metal-organic chemical vapor deposition (MOCVD): rf heating and quartz lamp heating. This paper reports a new method, the quartz-envelope heater, and describes its use for producing undoped GaAs with AsH3 and TMG in an MOCVD system. Also discussed are growth-rate and morphological studies, variations of electrical properties with different growth parameters, and refinements to the present heater design.

Key words  heater design - epitaxial - gallium arsenide - metal-organic chemical vapor deposition - electrical properties - OMVPE

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