This paper describes current research and development on a robotic visual servoing system for assembly of MEMS (Micro-Electro-Mechanical) parts. The workcell consists of an AMTI robot, precision stage, long working distance microscope, and LIGA (Lithography Galvonoforming Abforming) fabricated tweezers for picking up the parts. Fourier optics methods are used to generate synthetic microscope images from CAD drawings. These synthetic images are used off-line to test image processing routines under varying magnifications and depths of field. They also provide reference image features which are used to visually servo the part to desired position.