The free energy and correlation lengths of the spin-1/2XYZ chain are studied at finite temperature. We use the quantum transfer matrix approach and derive non-linear integral equations for all eigenvalues. Analytic results are presented for the low-temperature asymptotics, in particular for the criticalXXZ chain in an external magnetic field. These results are compared to predictions by conformal field theory. The integral equations are solved numerically for the non-criticalXXZ chain and the related spin-1 biquadratic chain at arbitrary temperature.