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Abstract

Ultra-thin membrane with nanoscale through hole has great potential in biomedical applications, where precise controllability of porosity, pore size and film thickness is urgently required. The present work proposed a cost-effective way to prepare the ultra-thin nanoporous film with a promising controllability. Monodispersed nanoparticle, rather than photoresist, is used as the sacrificial material for this new lift-off process. By releasing the particles, holes can be achieved with predetermined characters. A 110 nm-thick nanoporous aluminum film with well-controlled pore’s diameter was successfully fabricated to validate the technique. The technique has wider process window and better applicability than other nanofabrication methods.

Keywords  nanoparticle - lift-off - nanoporous film

Supported by the National Natural Science Foundation of China (Grant Nos. 60606014 and 90607004)

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