Silver tantalate niobate films are candidates for temperature stable microwave dielectrics. In this work, a chemical solution
deposition synthesis method was developed for Ag
x
(Ta
0.5Nb
0.5)O
3−y
films on Pt-coated Si substrates. Stable solutions with a range of silver stoichiometries were prepared using 2-methoxyethanol
and pyridine as solvents, from AgNO
3 and Nb and Ta ethoxide precursors. It was extremely difficult to prepare phase-pure perovskite films of Ag(Ta
0.5Nb
0.5)O
3 on Pt-coated Si subtrates; instead a mixture of perovskite and natrotantite phases was identified. Such mixed phase films
had dielectric constant ɛ
r
and dielectric loss tanδ values ranging from 200±20 to 270±25 and 0.006±0.002 to 0.002±0.001 at 100 kHz, respectively, depending
on the firing temperature. For Ag
2(Ta
0.5Nb
0.5)
4O
11, Ag
0.8(Ta
0.5Nb
0.5)O
2.9, Ag
0.85(Ta
0.5Nb
0.5)O
2.925 and Ag
0.9(Ta
0.5Nb
0.5)O
2.95 films, mainly the natrotantite phase was observed. The
ɛ
r
values of these films were between 70±10 and 130±15 with tan δ values of 0.008±0.002 at 100 kHz.
Keywords Silver tantalate niobate - Thin film - Chemical solution deposition