In 2003 the ateM workshop series was established to discuss the use of Schemas and Metaschemas in reverse engineering (ateM is Meta reverse). ateM 2003, which was part of the 10th International Conference on Reverse Engineering held in Victoria, Canada, already dealt with model driven approaches to support program analysis and comprehension. Since models in reverse engineering mostly deal with documents written in certain programming or modeling languages, the extension of ateM towards grammars was a consistent step. Thus, ateM 2004, held at the 11th International Conference on Reverse Engineering, Delft, The Netherlands, viewed Metamodels, Schemas and Grammars. Nowadays model driven approaches are common in software engineering and furthermore, ontologies complement modeling technologies used today. So, the third ateM-workshop, which was part of the 9th International Conference on Model Driven Engineering, Languages and Systems in Genova, Italy, dealt with Metamodels, Schemas, Grammars and Ontologies.